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Message ID: 957 Entry time: 28 Nov 2024, 08:22

Author:	Kai-Erik Pfeiffer
Location:	XHEXP
Severity:	Information
Subject:	SCS Support

Supported SCS with moving a Chamber with airpads under the clean tent to make space for another Chamber.

Coworkers: J. T. Delitz, S. Menzel, K. Pfeiffer

Attachment 1:

20241128_081216.jpg 3.975 MB | Hide | Hide all

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