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Message ID: 410 Entry time: 25 Oct 2023, 04:48

Author:	Chan Kim
Group:	SPB
Subject:	Issue

SA3 background is very strong and it affects our NKB (nano KB, Ru coating) focus.

Attachment 1: optimized NKB focus with 1 pulse @SA3

Attachment 2: optimized NKB focus + SA3 BG with 375 pulses @SA3

Attachment 3: optimized NKB focus with 375 pulses @SA3

Attachment 4: optimized NKB focus with 375 pulses @SA3, but after changing number of pulses to 1 @SA3

Attachment 1:

Screenshot_from_2023-10-25_02-37-38.png 736 kB Uploaded 25 Oct 2023, 05:50 | Hide | Hide all | Show all

Attachment 2:

Screenshot_from_2023-10-25_02-42-21.png 746 kB Uploaded 25 Oct 2023, 05:53 | Show | Hide all | Show all

Attachment 3:

Screenshot_from_2023-10-25_02-35-35.png 726 kB Uploaded 25 Oct 2023, 05:56 | Hide | Hide all | Show all

Attachment 4:

Screenshot_from_2023-10-25_02-36-16.png 734 kB Uploaded 25 Oct 2023, 05:56 | Show | Hide all | Show all

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